Picosecond laser microprocessing system

 

Integrated system:

  • Picosecond laser HyperRapid 50 , Coherent (Lumera)
  • Ultra-precize stages PlanarDL-200XY-ULTRA, Aerotech 
  • Galvanoscanners

Contact Person: Marian Zamfirescu
Email: marian.zamfirescu@inflpr.ro
Tel: +4021 457 4550/ ext. 2401

Bogdan CALIN
Email: bogdan.calin@inflpr.ro
Tel: +4021 457 4550/ ext. 2401

Location: CETAL – Room A008a (Cleanroom ISO7)
Financing project: CETAL 8PM /I 26.11.2008

  

Laser

Stages and galvanoscanners

https://www.coherent.com/products/?2075/HYPER-RAPID

www.coherent.com
Model: HyperRapid 50

Wavelength 1064 nm , 532 nm and 355 nm
Pulse Repetition Rate (kHz) 400 to 1000
Spatial Mode TEM00 (M2 < 1.4)
Pulse Duration (ps) <15
Polarization Ratio >>100:1
Beam Divergence, Full Angle (mrad) <1
Beam Circularity (%) >85
Beam-Pointing Stability in Full PRF range (µrad / °C) <50
Beam Diameter (μm) ~3000 at 1064 nm
Bore-Sight Accuracy ±0.5 mm and <5 mrad
Warm-Up Time <40 min from chiller start

www.aerotech.com
Model: PlanarDL-200XY-ULTRA

Travel 200 mm x 200 mm
Accuracy ±0.5 µm
Bidirectional Repeatability ±0.1 µm
Resolution(Minimum Incremental Motion) 3 nm
Straightness ±0.5 µm
Flatness ±1.5 µm
Pitch 15 arc sec
Roll 15 arc sec
Yaw 8 arc sec
Orthogonality 1 arc sec
Maximum Speed 750 mm/s